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Publications 2

[1]

Doping-induced Ti3+ state and oxygen vacancies in TiO2: A single-chip combinatorial investigation

Article

July 2023 | Materials Chemistry and Physics 308:128283

Authors: Raja Elrahoumi, Liangchen Zhu, Estelle Wagner, William Maudez, Giacomo Benvenuti, Matthew R. Phillips, Cuong Ton-That
DOI: 10.1016/j.matchemphys.2023.128283

[2]

Structural and dielectric investigation of thermal treated TiO2/ZrO2 composite thin films grown by Chemical Beam Vapor Deposition

Article

May 2023 | Thin Solid Films 778(11):139883

Authors: Rashmi Rani, Md KASHIF Shamim, William Maudez, Estelle Wagner, Radheshyam Rai, Seema Sharma, Giacomo Benvenuti
DOI: 10.1016/j.tsf.2023.139883

[3]

CBVD grown HfO2 on TiN for high-precision MIM capacitor

Article

February 2023 | Physica B Condensed Matter 650(27):414541

Authors: Rashmi Rani, William Maudez, Rajat Syal, Radheshyam Rai, Sanjeev Kumar, Md KASHIF Shamim, Estelle Wagner, Seema Sharma, Giacomo Benvenuti

DOI: 10.1016/j.physb.2022.414541

[4]

A multidimensional thin film based PUF as new approach to Strong PUFs

Preprint

January 2023

Authors: Benjamin Malthiery, Estelle Wagner, Giacomo Benvenuti

DOI: 10.21203/rs.3.rs-2459405/v1
License CC BY 4.0

[5]

Widely Tuneable Composition and Crystallinity of Graded Na1+xTaO3±δ Thin Films Fabricated by Chemical Beam Vapor Deposition

Article

March 2022 | Nanomaterials 12(6):1012

Authors: Corrado Garlisi, Petru Lunca-Popa, Kevin Menguelti, Vincent Rogé, Marc Michel, Christèle Vergne, Jérôme Guillot, Estelle Wagner, William Maudez, Giacomo Benvenuti, Bianca Rita Pistillo, Emanuele Barborini

DOI: 10.3390/nano12061012
License CC BY 4.0

[6]

High-K Nanocomposite Zro2/Tio2 Thin Films Deposited by Chemical Beam Vapor Deposition for Dielectric Applications

Article

January 2022 | SSRN Electronic Journal

Authors: Rashmi Rani, Md KASHIF Shamim, Seema Sharma, Estelle Wagner, William Maudez, Giacomo Benvenuti, Radheshyam Rai

DOI: 10.2139/ssrn.4178964

[7]

Cbvd Grown Hfo2 on Tin for High-Precision Mim Capacitor

Article

January 2022 | SSRN Electronic Journal

Authors: Rashmi Rani, William Maudez, Rajat Syal, Radheshyam Rai, Sanjeev Kumar, Md KASHIF Shamim, Estelle Wagner, Seema Sharma, Giacomo Benvenuti

DOI: 10.1016/j.matchemphys.2021.125561

[8]

Study of titanium amino-alkoxide derivatives as TiO2 Chemical Beam Vapour Deposition precursor

Article

December 2021 | Materials Chemistry and Physics 277:125561

Authors: Diane Bijou, Estelle Wagner, William Maudez, Thibaut Cornier, Mohamed Yettou, Giacomo Benvenuti, Stephane Daniele

DOI: 10.2139/ssrn.4265448

[9]

Synthesis and Thermal Behavior of Heteroleptic γ‐Substituted Acetylacetonate‐Alkoxides of Titanium

Article

April 2021 | Berichte der deutschen chemischen Gesellschaft 2021(3)

Authors: Diane Bijou, Thibaut Cornier, Shashank Mishra, Lynda Merzoud, Henry Chermette, Erwan JEANNEAU, William MAUDEZ, Giacomo Benvenuti, Stephane Daniel

DOI: 10.1002/ejic.202100209

[10]

Synthesis and Thermal Behavior of Heteroleptic γ‐Substituted Acetylacetonate‐Alkoxides of Titanium

Conference Paper

March 2021

Authors: Estelle Wagner, William Maudez, Sarunas Bagdzevicius, C.s. Sandu, Giacomo Benvenuti

DOI: 10.1117/12.2591443
Conference: Photonics West – Oxide-based Materials and Devices XII

[11]

450 mm substrates equipment reached!

Experiment Findings

April 2017

Authors: Giacomo Benvenuti

Conference: 10ème Conférence sur le Génie Electrique, CGE’10At: Algiers , Algeria

[12]

Développement d’un réflectomètre optique pour les mesures in-situ et en temps réel de la croissance des couches minces.

Conference Paper

March 2021

Authors: M.K YETTOU, Zoubir Mahdjoub, Estelle Wagner, Giacomo Benvenuti

[13]

Amorphous Silicon-Doped Titania Films for on-Chip Photonics

Article

February 2017 | ACS Photonics 4(5)

Authors: Thomas Kornher, Kangwei Xia, Roman Kolesov, Bruno Villa, Stefan Lasse, C.s. Sandu, Estelle Wagner, Scott Harada, Giacomo Benvenuti, Hans-Werner Becker, Jörg Wrachtrup

DOI: 10.1021/acsphotonics.6b00919

[14]

A combinatorial chemical beam vapour deposition approach to tune the electrical conductivity of Nb:TiO2 films via Si co-doping

Article

July 2016 | Thin Solid Films 615

Authors: C.s. Sandu, Estelle Wagner, Scott Harada, Giacomo Benvenuti, William Maudez, Marc Jobin, Cédric Pellodi, Paul Muralt

DOI: 10.1016/j.tsf.2016.07.032

[15]

Geometry of Chemical Beam Vapour Deposition System for Efficient Combinatorial Investigations of Thin Oxide Films: Deposited Film Properties versus Flow Simulations

Article

February 2016 | ACS Combinatorial Science 18(3)

Authors: Estelle Wagner, C.s. Sandu, Scott Harada, Cédric Pellodi, Marc Jobin, Paul Muralt, Giacomo Benvenuti

DOI: 10.1021/acscombsci.5b00146

[16]

Fabrication of complex oxide microstructures by combinatorial chemical beam vapour deposition through stencil masks

Article

April 2015 | Thin Solid Films 586

Authors: Estelle Wagner, C.s. Sandu, Scott Harada, Giacomo Benvenuti, V. Savu, Paul Muralt

DOI: 10.1016/j.tsf.2015.04.021

[17]

Evaluation of niobium dimethylamino-ethoxide for chemical vapour deposition of niobium oxide thin films

Article

November 2014 | Thin Solid Films 571

Authors: Ali Dabirian, Yury Kuzminykh, Estelle Wagner, Giacomo Benvenuti, Simon Rushworth, Patrik Hoffmann

DOI: 10.1016/j.tsf.2014.09.073

[18]

Large area deposition in high vacuum with high thickness uniformity

Patent

October 2014 | License USPTO TOS | Patent: US8852344B2

Authors: Giacomo Benvenuti, Estelle Wagner, Simone Amorosi, Patrik Hoffmann

[19]

Full wafer metrology for chemically graded thin films

Article

May 2012 | Proceedings of SPIE – The International Society for Optical Engineering 8430:7-

Authors: Marc Jobin, Stéphane Jotterand, Cédric Pellodi, Sergio dos Santos, C.s. Sandu, Estelle Wagner, Giacomo Benvenuti

DOI: 10.1117/12.922652

[20]

Cover Picture: Chemical Vapor Deposition Kinetics and Localized Growth Regimes in Combinatorial Experiments (ChemPhysChem 18/2011)

Article

December 2011 | ChemPhysChem 12(18):3524-8 | Source: PubMed

Authors: Ali Dabirian, Yury Kuzminykh, Estelle Wagner, Giacomo Benvenuti, Simon Rushworth, Patrik Hoffmann

DOI: 10.1002/cphc.201100637
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